3D Simulation for Melt Laser Anneal Integration in FinFETâs Contact
Tabata, Toshiyuki, Curvers, Benoit, Huet, Karim, Chew, Soon Aik, Everaert, Jean-Luc, Horiguchi, NaotoYear:
2020
Journal:
IEEE Journal of the Electron Devices Society
DOI:
10.1109/jeds.2020.3030923
File:
PDF, 700 KB
2020