3D Simulation for Melt Laser Anneal Integration in...

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3D Simulation for Melt Laser Anneal Integration in FinFET’s Contact

Tabata, Toshiyuki, Curvers, Benoit, Huet, Karim, Chew, Soon Aik, Everaert, Jean-Luc, Horiguchi, Naoto
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Year:
2020
Journal:
IEEE Journal of the Electron Devices Society
DOI:
10.1109/jeds.2020.3030923
File:
PDF, 700 KB
2020
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