![](/img/cover-not-exists.png)
[IEEE 2020 International Russian Automation Conference (RusAutoCon) - Sochi, Russia (2020.9.6-2020.9.12)] 2020 International Russian Automation Conference (RusAutoCon) - Bias-Corrected Optical Measurement of Film Thickness for Vacuum Evaporation Coating
Drobotun, Valery, Rozov, AndreiYear:
2020
DOI:
10.1109/rusautocon49822.2020.9208188
File:
PDF, 847 KB
2020