Comparison of Abatement Models for CF₄ Reacting With...

  • Main
  • 2020
  • Comparison of Abatement Models for CF₄ Reacting With...

Comparison of Abatement Models for CF₄ Reacting With Nitrogen Thermal Plasma

Chau, Shiu-Wu, Chien, Sheng-Wei, Chen, Shiaw-Huei
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Year:
2020
Journal:
IEEE Transactions on Plasma Science
DOI:
10.1109/tps.2020.3028583
File:
PDF, 9.95 MB
2020
Conversion to is in progress
Conversion to is failed