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Laser-induced fluorescence of OH and SiO molecules during thermal chemical vapour deposition of SiO2 from silane-oxygen mixtures
Peter van de Weijer, Bauke H. ZwerverVolume:
163
Year:
1989
Language:
english
Pages:
7
DOI:
10.1016/0009-2614(89)80009-0
File:
PDF, 562 KB
english, 1989