Dissociative excitation of SiH4 by collisions with helium...

Chemical Physics Letters 1989 Vol. 158; Iss. 5

Dissociative excitation of SiH4 by collisions with helium active species

Masaharu Tsuji, Kazunari Kobarai, Surnio Yamaguchi, Yukio Nishimura
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Volume:
158
Year:
1989
Language:
english
Pages:
5
DOI:
10.1016/0009-2614(89)87372-5
File:
PDF, 423 KB
english, 1989
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