Study on the Variation of Surface Morphology and Residual...

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Electronic Materials Letters 2020 / 11

Study on the Variation of Surface Morphology and Residual Stress Under Various Thermal Annealing Conditions with Bulk GaN Substrates Grown by HVPE

Lee, Hee Ae, Park, Jae Hwa, Lee, Joo Hyung, Lee, Seung Hoon, Kang, Hyo Sang, Lee, Seong Kuk, Park, Won Il, Yi, Sung Chul
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Journal:
Electronic Materials Letters
DOI:
10.1007/s13391-020-00252-x
Date:
November, 2020
File:
PDF, 3.02 MB
2020
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