[IEEE 2020 31st Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Saratoga Springs, NY, USA (2020.8.24-2020.8.26)] 2020 31st Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Creative Use of Vector Scan for Efficient SRAM Inspection
Patterson, Oliver D., Peng, Hsiao-Chi, Hu, Haokun, Huang, Chih-Chung, Venkatachalam, Panneer S.Year:
2020
DOI:
10.1109/asmc49169.2020.9185264
File:
PDF, 271 KB
2020