Improvements in Thermal Stability of Cobalt-Silicide Films...

Journal of the Society of Materials Science Japan 2008 Vol. 57; Iss. 9

Improvements in Thermal Stability of Cobalt-Silicide Films by Adding Nickel

SHIMAZU, Hiromi, IWASAKI, Tomio, OHTA, Hiroyuki, MIURA, Hideo
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Volume:
57
Year:
2008
Journal:
Journal of the Society of Materials Science, Japan
DOI:
10.2472/jsms.57.929
File:
PDF, 722 KB
2008
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