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Charge Transport Mechanism in Atomic Layer Deposited OxygenâDeficient TaO x films
Gismatulin, A. A., Gritsenko, V. A., Perevalov, T. V., Kuzmichev, D. S., Chernikova, A.G., Markeev, AndreyJournal:
physica status solidi (b)
DOI:
10.1002/pssb.202000432
Date:
October, 2020
File:
PDF, 596 KB
2020