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Improved Deep Trench Super-junction LDMOS Breakdown Voltage By Shielded Silicon-Insulator-Silicon Capacitor

Wu, Lijuan, Ding, Qilin, Chen, Jiaqi
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Journal:
Silicon
DOI:
10.1007/s12633-020-00771-0
Date:
October, 2020
File:
PDF, 1.71 MB
2020
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