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Defective wafer detection using a denoising autoencoder for semiconductor manufacturing processes
Fan, Shu-Kai S., Hsu, Chia-Yu, Jen, Chih-Hung, Chen, Kuan-Lung, Juan, Li-TingVolume:
46
Journal:
Advanced Engineering Informatics
DOI:
10.1016/j.aei.2020.101166
Date:
October, 2020
File:
PDF, 3.97 MB
2020