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Ultra-precision raster grinding of monocrystalline silicon biconical free-form optics using arc-shaped diamond grinding wheels
Wang, Sheng, Zhao, Qingliang, Guo, Bing, Pan, YongchengVolume:
58
Journal:
Journal of Manufacturing Processes
DOI:
10.1016/j.jmapro.2020.09.020
Date:
October, 2020
File:
PDF, 11.30 MB
2020