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Surface mobility and impact of precursor dosing during atomic layer deposition of platinum: in situ monitoring of nucleation and island growth
Dendooven, Jolien, Van Daele, Michiel, Solano, Eduardo, Ramachandran, Ranjith K., Minjauw, Matthias M., Resta, Andrea, Vlad, Alina, Garreau, Yves, Coati, Alessandro, Portale, Giuseppe, Detavernier, ChYear:
2020
Journal:
Physical Chemistry Chemical Physics
DOI:
10.1039/d0cp03563g
File:
PDF, 8.18 MB
2020