Technology for the formation of refractory metals for...

IOP Conference Series Materials Science and Engineering 2020 / 08 Vol. 905

Technology for the formation of refractory metals for micro- and nanoelectronics products

Mustafaev, G A, Khasanov, A I, Cherkesova, N V, Mustafaev, A G
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Volume:
905
Journal:
IOP Conference Series: Materials Science and Engineering
DOI:
10.1088/1757-899X/905/1/012048
Date:
August, 2020
File:
PDF, 236 KB
2020
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