[IEEE 2020 33rd International Vacuum Nanoelectronics Conference (IVNC) - Lyon, France (2020.7.6-2020.7.10)] 2020 33rd International Vacuum Nanoelectronics Conference (IVNC) - Individually Addressable Fully Integrated Field Emission Electron Source Fabricated by Laser Micromachining of Silicon
Lawrowski, Robert, Hausladen, Matthias, Schreiner, RupertYear:
2020
DOI:
10.1109/ivnc49440.2020.9203470
File:
PDF, 4.21 MB
2020