Cu–W FILM STRUCTURE INFLUENCED BY Ar+ ENERGY AND...

Surface Review and Letters 2020 / 11 Vol. 27; Iss. 11

Cu–W FILM STRUCTURE INFLUENCED BY Ar+ ENERGY AND LOW-ENERGY BEAM FLOW BOMBARD DURING PREPARATION BY TWO-ION-BEAM SPUTTERING

AI, YONG-PING, XIE, SHI-KUN
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Volume:
27
Journal:
Surface Review and Letters
DOI:
10.1142/S0218625X2050002X
Date:
November, 2020
File:
PDF, 760 KB
2020
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