Polysilicon MEMS Sensors: Sensitivity to Sub-Micron...

Polysilicon MEMS Sensors: Sensitivity to Sub-Micron Imperfections

Ghisi, Aldo, Geninazzi, Marco Victor, Mariani, Stefano
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
4
Journal:
Proceedings
DOI:
10.3390/ecsa-5-05858
Date:
November, 2018
File:
PDF, 437 KB
2018
Conversion to is in progress
Conversion to is failed