Proceedings (American Bar Association. Section of International and Comparative Law)
2018 / 11 Vol. 4; Iss. 1
Polysilicon MEMS Sensors: Sensitivity to Sub-Micron Imperfections
Ghisi, Aldo, Geninazzi, Marco Victor, Mariani, StefanoVolume:
4
Journal:
Proceedings
DOI:
10.3390/ecsa-5-05858
Date:
November, 2018
File:
PDF, 437 KB
2018