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A study of hopping transport during discharging in SiNx films for MEMS capacitive switches
Birmpiliotis, D., Koutsoureli, M., Stavrinidis, G., Konstantinidis, G., Papaioannou, G.Journal:
Microelectronics Reliability
DOI:
10.1016/j.microrel.2020.113878
Date:
October, 2020
File:
PDF, 1.42 MB
2020