Damage effects in 6H-SiC single crystals by Si&H dual...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2020 / 12 Vol. 485

Damage effects in 6H-SiC single crystals by Si&H dual ion irradiation: A combined Raman and XRD study

Wang, Xu, Ji, Yaqi, Zhang, Ming, Zhao, Yunbiao, Chen, Yuhan, Zhao, Ziqiang, Pan, Sheqi, Wang, Honglong
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Volume:
485
Journal:
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
DOI:
10.1016/j.nimb.2020.10.011
Date:
December, 2020
File:
PDF, 1.70 MB
2020
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