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Technology for forming micro devices based on gallium nitride
Zhelannov, A V, Seleznev, B I, Fedorov, D GVolume:
939
Journal:
IOP Conference Series: Materials Science and Engineering
DOI:
10.1088/1757-899X/939/1/012082
Date:
October, 2020
File:
PDF, 659 KB
2020