Technology for forming micro devices based on gallium...

IOP Conference Series Materials Science and Engineering 2020 / 10 Vol. 939

Technology for forming micro devices based on gallium nitride

Zhelannov, A V, Seleznev, B I, Fedorov, D G
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Volume:
939
Journal:
IOP Conference Series: Materials Science and Engineering
DOI:
10.1088/1757-899X/939/1/012082
Date:
October, 2020
File:
PDF, 659 KB
2020
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