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Ultrasonic atomization of titanium isopropoxide at room temperature for TiO 2 atomic layer deposition
Jang, Moon-Hyung, Lei, YuVolume:
38
Journal:
Journal of Vacuum Science & Technology A
DOI:
10.1116/6.0000464
Date:
December, 2020
File:
PDF, 2.44 MB
2020