An Experimental and Theoretical Study of the Impact of the...

An Experimental and Theoretical Study of the Impact of the Precursor Pulse Time on the Growth Per Cycle and Crystallinity Quality of TiO2 Thin Films Grown by ALD and PEALD Technique

Chiappim, William, Fraga, Mariana Amorim, Maciel, Homero Santiago, Pessoa, Rodrigo Sávio
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Volume:
6
Journal:
Frontiers in Mechanical Engineering
DOI:
10.3389/fmech.2020.551085
Date:
October, 2020
File:
PDF, 3.75 MB
2020
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