Air Annealing Effect on Oxygen Vacancy Defects in Al-doped...

Molecules 2020 / 10 Vol. 25; Iss. 21

Air Annealing Effect on Oxygen Vacancy Defects in Al-doped ZnO Films Grown by High-Speed Atmospheric Atomic Layer Deposition

Hsu, Chia-Hsun, Geng, Xin-Peng, Wu, Wan-Yu, Zhao, Ming-Jie, Zhang, Xiao-Ying, Huang, Pao-Hsun, Lien, Shui-Yang
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Volume:
25
Journal:
Molecules
DOI:
10.3390/molecules25215043
Date:
October, 2020
File:
PDF, 3.44 MB
2020
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