On the Effects of Spherical Aberration and Aperture Misalignment on the Formation of Small Electron Probes
Garratt-Reed, Anthony J., Cliff, Graham, Kenway, Peter B.Volume:
4
Journal:
Microscopy and Microanalysis
DOI:
10.1017/S143192760002208X
Date:
July, 1998
File:
PDF, 643 KB
1998