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XPS Evaluation of Samples Surface Cleaned by the XEI Evactron ®
Walck, Scott D., Strohmeier, Brian R., Goralski, Edward G., Vane, Ronald A.Volume:
7
Journal:
Microscopy and Microanalysis
DOI:
10.1017/S1431927600030531
Date:
August, 2001
File:
PDF, 894 KB
2001