The Effect of Implanted Gallium on the Recrystallization of...

Microscopy and Microanalysis 2001 / 08 Vol. 7; Iss. S2

The Effect of Implanted Gallium on the Recrystallization of Amorphous Layers formed during FIB Milling of Silicon

Rubanov, S., Munroe, P.R.
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Volume:
7
Journal:
Microscopy and Microanalysis
DOI:
10.1017/S1431927600030865
Date:
August, 2001
File:
PDF, 795 KB
2001
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