Automated Focus of the Microprobe (Z) Using the Optical...

Automated Focus of the Microprobe (Z) Using the Optical Signal

Delisle, N., Grillon, F., Thiot, J.F.
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Volume:
6
Journal:
Microscopy and Microanalysis
DOI:
10.1017/s1431927600034644
Date:
August, 2000
File:
PDF, 222 KB
2000
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