Electrical Isolation Preserved by Plasma Focused Ion Beam TEM Sample Preparation and Verified with STEM SEEBIC Imaging
Mecklenburg, Matthew, Shaapur, Fred, Hubbard, William, Zutter, Brian, Regan, B. C.Journal:
Microscopy and Microanalysis
DOI:
10.1017/s1431927620013756
Date:
July, 2020
File:
PDF, 381 KB
2020