A New Generation Plasma FIB Column with Higher Probe...

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  • A New Generation Plasma FIB Column with Higher Probe...

A New Generation Plasma FIB Column with Higher Probe Current and Improved Imaging Resolution

Hrnčíř, Tomáš, Nešpor, Dušan, Radi, Zsolt, Jiruše, Jaroslav, Hladík, Lukáš, Salord, Olivier, Delobbe, Anne
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Journal:
Microscopy and Microanalysis
DOI:
10.1017/s1431927620014580
Date:
July, 2020
File:
PDF, 162 KB
2020
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