Beam Damage by Transmission Electron Microscopy in FinFet Structures
Lian, Guoda, Ali, Malik, Boettcher, Steve, Acoccella, Joyce, Bruley, John, Yeow, Timothy, Tang, Dong, Alexandrou, IoannisJournal:
Microscopy and Microanalysis
DOI:
10.1017/s1431927620018760
Date:
July, 2020
File:
PDF, 349 KB
2020