Automation of In-trench TEM Lamella Workflow Increasing Throughput for Lift-out
Å ikula, Marek, HladÃk, Lukáš, OboÅa, Jozef, VáÅa, RostislavJournal:
Microscopy and Microanalysis
DOI:
10.1017/s1431927620020012
Date:
July, 2020
File:
PDF, 536 KB
2020