Challenges in Characterizations of MTJ Thin Film Stack for Spin-Transfer Torque MRAM Device by Analytical TEM in Wafer-foundries
Zhao, Wayne, Dixit, Hemant, Mitchell, Travis, Taylor, WilliamJournal:
Microscopy and Microanalysis
DOI:
10.1017/s1431927620022898
Date:
July, 2020
File:
PDF, 517 KB
2020