Fabrication of low aspect ratio three-element Boersch phase...

Journal of Applied Physics 2020 / 10 Vol. 128; Iss. 13

Fabrication of low aspect ratio three-element Boersch phase shifters for voltage-controlled three electron beam interference

Thakkar, Pooja, Guzenko, Vitaliy A., Lu, Peng-Han, Dunin-Borkowski, Rafal E., Abrahams, Jan Pieter, Tsujino, Soichiro
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Volume:
128
Journal:
Journal of Applied Physics
DOI:
10.1063/5.0020383
Date:
October, 2020
File:
PDF, 4.57 MB
2020
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