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Confined and guided catalytic growth of crystalline silicon films on a dielectric substrate
Lecestre, A, Dubois, E, Villaret, A, Coronel, P, Skotnicki, T, Delille, D, Maurice, C, Troadec, DVolume:
6
Journal:
IOP Conference Series: Materials Science and Engineering
DOI:
10.1088/1757-899X/6/1/012022
Date:
November, 2009
File:
PDF, 1.52 MB
2009