Development of mathematical models for calculating statics...

IOP Conference Series Materials Science and Engineering 2019 / 07 Vol. 560

Development of mathematical models for calculating statics and dynamics of membrane sensitive elements of microelectromechanical control systems

Bibikov, S V, Kalinkina, M E, Kozlov, A S, Korobeynikov, A G, Labkovskaia, R I, Pirozhnikova, O I, Tkalich, V L
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Volume:
560
Journal:
IOP Conference Series: Materials Science and Engineering
DOI:
10.1088/1757-899x/560/1/012022
Date:
July, 2019
File:
PDF, 878 KB
2019
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