Low-resistivity SrRuO3 thin films formed on SiO2 substrates...

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Journal of Alloys and Compounds 2020 / 10

Low-resistivity SrRuO3 thin films formed on SiO2 substrates without buffer layer by RF magnetron sputtering

Kim, Hyun Min, Lee, Jong Hoon, Yom, Ahram, Lee, Han Sol, Kim, Dong Geun, Ko, Dong Wan, Kim, Hong Seung, Ahn, Ji-Hoon
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Journal:
Journal of Alloys and Compounds
DOI:
10.1016/j.jallcom.2020.157627
Date:
October, 2020
File:
PDF, 2.17 MB
2020
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