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Control of Si-Island Free Ultra-Thin Simox Structures by Implant Energy and Oxygen Dose
Johnson, B., Jiao, J., Seraphin, S., Yan, T., Wilson, T., Anc, M., Cordts, B.Volume:
5
Journal:
Microscopy and Microanalysis
DOI:
10.1017/S1431927600017050
Date:
August, 1999
File:
PDF, 1.86 MB
1999