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Silicon Oxynitride Film Thickness Measurements Using HRTEM and Grazing Incidence X-Ray Photoelectron Spectroscopy (GIXPS)
Scott, John Henry J., Landree, Eric W., Jach, Terrence, Windsor, Eric S.Volume:
6
Journal:
Microscopy and Microanalysis
DOI:
10.1017/S1431927600032797
Date:
August, 2000
File:
PDF, 1.14 MB
2000