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Demolding force dependence on mold surface modifications in UV nanoimprint lithography
Li, Mingjie, Chen, Yulong, Luo, Wenxin, Cheng, XingJournal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2020.111470
Date:
November, 2020
File:
PDF, 1.35 MB
2020