Thickness measurement of low-Z films fabricated on thick...

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Thickness measurement of low-Z films fabricated on thick substrate using EDXRF technique

Upmanyu, Arun Kumar, Kailash,, Kapil, Ashutosh, Mehta, D., Kumar, Sanjeev
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Journal:
Vacuum
DOI:
10.1016/j.vacuum.2020.109852
Date:
October, 2020
File:
PDF, 3.65 MB
2020
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