A TEM Study of Cr Based Contacts to (0001) 6H-SiC

A TEM Study of Cr Based Contacts to (0001) 6H-SiC

Liu, R.-J., Kim, M. J., Carpenter, R. W., Porter, L. M., Scheunemann, L. P., Davis, R. F.
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Volume:
6
Journal:
Microscopy and Microanalysis
DOI:
10.1017/S1431927600037818
Date:
August, 2000
File:
PDF, 1.03 MB
2000
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