A NOVEL FABRICATION METHOD OF TWO-DIMENSIONAL NANO-MOLD BY...

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Surface Review and Letters 2020 / 10

A NOVEL FABRICATION METHOD OF TWO-DIMENSIONAL NANO-MOLD BY COMBINING ULTRAVIOLET LITHOGRAPHY WITH WET ETCHING TECHNOLOGY

CHENG, E, TANG, SUZHOU, LIU, LINGPENG, ZOU, HELIN, ZHANG, ZHENGYAN
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Journal:
Surface Review and Letters
DOI:
10.1142/S0218625X20500286
Date:
October, 2020
File:
PDF, 3.85 MB
2020
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