Al/F codoping effect on the structural, electrical, and...

Applied Surface Science 2021 / 01 Vol. 535

Al/F codoping effect on the structural, electrical, and optical properties of ZnO films grown via atomic layer deposition

Kang, Kyung-Mun, Wang, Yue, Kim, Minjae, Lee, Chan, Park, Hyung-Ho
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Volume:
535
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2020.147734
Date:
January, 2021
File:
PDF, 206 KB
2021
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