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Precision TEM Specimen Preparation for Integrated Circuits using Dual-Beam FIB Lift-Out Technique
Xu, Youren, Schwappach, Chris, Cervantes, RonVolume:
6
Journal:
Microscopy and Microanalysis
DOI:
10.1017/S1431927600035078
Date:
August, 2000
File:
PDF, 2.79 MB
2000