On-site tetrafluoroethylene gas generation from...

Chemical Engineering Science 2021 / 01 Vol. 229

On-site tetrafluoroethylene gas generation from moderate-pressure pure tetrafluoromethane plasma reactor

Ohmi, Hiromasa, Kikura, Jou, Tanaka, Tomoyuki, Tanaka, Rei, Iino, Daiki, Sakai, Itsuko, Kurihara, Kazuaki, Fukumizu, Hiroyuki, Abe, Junko, Fukuhara, Jota, Hayashi, Hisataka, Kakiuchi, Hiroaki, Yasutak
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Volume:
229
Journal:
Chemical Engineering Science
DOI:
10.1016/j.ces.2020.116125
Date:
January, 2021
File:
PDF, 587 KB
2021
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