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Characterization of silane based ultra-thin barrier deposited at elevated temperature
Kadan-Jamal, Kian, Almog, Rakefet Ofek, Zhou, Junyi, Dotan, Tali, Sverdlov, Yelena, Dagan, Ronen, Shacham-Diamand, YosiVolume:
235
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2020.111468
Date:
January, 2021
File:
PDF, 2.23 MB
2021