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Focused Ion Beam Induced Copper Artifact Dose Study
Rossie, B.B., Anderson, S.D., Stevie, F.A., Brown, S.R., Shofner, T.L.Volume:
6
Journal:
Microscopy and Microanalysis
DOI:
10.1017/S1431927600035169
Date:
August, 2000
File:
PDF, 1.40 MB
2000