Comparison of Cavities Formed in Single Crystalline and...

Chinese Physics Letters 2020 / 07 Vol. 37; Iss. 7

Comparison of Cavities Formed in Single Crystalline and Polycrystalline α-SiC after H Implantation

Liao, Qing, Kang, Long, Zhang, Tong-Min, Liu, Hui-Ping, Wang, Tao, Li, Xiao-Gang, Li, Jin-Yu, Yang, Zhen, Li, Bing-Sheng
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Volume:
37
Journal:
Chinese Physics Letters
DOI:
10.1088/0256-307X/37/7/076102
Date:
July, 2020
File:
PDF, 2.40 MB
2020
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