Characteristics of thin films formed by the ionized-cluster...

Journal of Crystal Growth 1978 Vol. 45; Iss. none

Characteristics of thin films formed by the ionized-cluster beam technique

Isao Yamada, Kakuei Matsubara, Mitsuharu Kodama, Masahide Ozawa, Toshinori Takagi
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Volume:
45
Year:
1978
Language:
english
Pages:
6
DOI:
10.1016/0022-0248(78)90457-8
File:
PDF, 473 KB
english, 1978
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