Observation en microscopie électronique de la croissance...

Observation en microscopie électronique de la croissance d'oxydes sur une surface de silicium

J. Beauvillain, A. Claverie, B. Jouffrey
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Volume:
64
Year:
1983
Language:
french
Pages:
9
DOI:
10.1016/0022-0248(83)90340-8
File:
PDF, 765 KB
french, 1983
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